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英飞凌IGBT厂家 > 英飞凌IGBT模块问答 > 平面型与沟槽型IGBT特性上有哪些区别?

平面型与沟槽型IGBT特性上有哪些区别?

编辑 :

SHENZHENYISHENGTONGKEJIYOUXIANGONGSI

时间 : 2018-09-21 21:09 浏览量 : 40

平面型与沟槽型IGBT特性上有哪些区别


河北快3走势图ZAIXIANJINIGBTBIAOMIANJIEGOUZHONG,PINGMIANXINGHEGOUCAOXINGKEWEISHIGEZHANBANBIJIANGSHAN。HENDUODUZHEDIYICIJIECHUDAOZHEILIANGGEMINGCIDESHIHOU,KENENGHUIGUMINGSIYIDIRENWEI,PINGMIANXINGIGBTDEDIANLIUJIUSHISHUIPINGLIUDONGDE,ERGOUCAOZHAIGBTDEDIANLIUJIUSHIZAICHUIZHIFANGXIANGSHANGLIUDONGDE。QISHIZHEISHIYIGEWUJIE,BULUNPINGMIANXINGHAISHIGOUCAOXINGDEIGBT,DIANLIUDOUSHIZAICHUIZHIFANGXIANGSHANGLIUDONGDE。SHENZHIYUTUIERGUANGZHI,BULUNIGBT,MOSFET,HAISHIJINGZHAGUAN,GONGLVERJIGUAN,SUOYOUWOMENSUOSHUXIDEDIANLIDIANZIQIJIAN,WEILEMANZUNAIYADEYAOQIU,DOUHUIRANGDIANLIUSHUZHILIUDONG。DUIIGBTLAISHUO,KONGXUEDIANLIUSHICONGBEIMIANDEJIDIANJIcollector,LIUXIANGZHENGMIANDEFASHEJIemitter;DIANZIDIANLIUCONGemitterCHUFA,JINGGUOBIAOMIANFANXINGGOUDAO,LIUXIANGBEIMIANDEcollector,RUTU1SUOSHI。


图1:IGBT中的电流方向


沟槽型IGBT相比于平面型IGBT,能在不增加关断损耗的前提下,大幅度地降低导通压降。沟槽栅是如何做到的呢?它有三个“绝招”:消除了JFET效应,沟道密度增加及近表面载流子浓度增加。

  • 消除JFET效应

GOUCAOZHAJIEGOUYUPINGMIANZHAJIJIEGOUDEZHUYAOQUBIEZAIYU,DANGIGBTKAITONGSHI,PXINGFASHEQUDEFANXINGGOUDAOSHICHUIZHIDEERBUSHISHUIPINGDE。


图2:平面型及沟槽型IGBT中反型沟道示意图


河北快3走势图ZAIPINGMIANZHAIGBTZHONG,ZHENGXIANGDAOTONGSHI,PJINGYUn-PIAOYIQUXINGCHENGDEPNJIECHUYUQINGWEIDEFANXIANGPIANZHIZHUANGTAI,YINERHUIXINGCHENGYOUYIDINGKUANDUDEKONGJIANDIANHEQU,TAJIZHANLEYIDINGDEKONGJIAN,YINCIDIANLIUZHINENGCONGYIGEXIANGDUIJIAOZHAIDEKONGJIANLIUGUO,ZENGDALEDIANLIUTONGLUSHANGDEZUKANG。


图3:平面型IGBT中的JFET效应


YINCI,ZAIPINGMIANZHAIGBTZHONG,ZAIDIANZILIUTONGFANGXIANGSHANG,BAOHANGOUDAODIANZURkanal,JFETDIANZURJFET,YUPIAOYIQUDIANZURn-。ERGOUCAOXINGIGBT,YINWEIGOUDAOCHUIZHI,XIAOMIELEJFETQUYU,YINERZHENGGEDIANLIUTONGLUSHANGZUKANGGENGDI。


图4:平面及沟槽IGBT导通阻抗对比


  • 近表面层载流子浓度增加

DUIYUPINGMIANZHAJIDEIGBT,ZAILIUZIDENONGDUCONGJIDIANJIDAOFASHEJIZHIJIANZHUBUJIANGDI。XINYIDAIIGBTDESHEJIMUBIAOSHIBAOCHIJIDIANJIDAOFASHEJIZHIJIANDEZAILIUZINONGDUJUNYUNFENBU,ZUIHAOSHIZHUBUZENGJIA,ZHEIYANGKEYIJINYIBUJIANGDIDAOTONGSUNHAO,ERBUHUIYINGXIANGTUOWEIDIANLIUHEGUANDUANSUNHAO。XIATUSHISANZHONGBUTONGJIEGOUDEIGBTPIAOYIQUZHONGZAILIUZINONGDUFENBU,WOMENKEYIKANDAO,ZAIKAOJINemitterDEWEIZHI,GOUCAOXINGIGBTZAILIUZINONGDUYUANGAOYUPINGMIANXINGIGBT。YINCI,ZAIGOUCAOXINGIGBT ZHONG,SHIDANGDEGOUCAOKUANDUYUJIANJUKEYITIGAON-QUJINBIAOMIANCENGDEZAILIUZINONGDU,CONGERJIANXIAOPIAOYIQUDIANZURn-。


图5:IGBT中载流子浓度分布


GOUDAOMIDUZENGJIAGOUDAOMIDUZENGJIA

  • 沟道密度增加

河北快3走势图XIANGBIYUPINGMIANZHAJIIGBT,GOUCAOIGBTDECHUIZHIJIEGOUSHENGQULEZAIGUIBIAOMIANSHANGZHIZUODAODIANGOUDAODEMIANJI,GENGYOULIYUSHEJIJINCOUDEYUANBAO。JIZAITONGDENGXINPIANMIANJISHANGKEYIZHIZUOGENGDUODEIGBTYUANBAO,CONGERZENGJIADAODIANGOUDAODEKUANDU,JIANGDIGOUDAODIANZU。

河北快3走势图ZAIGOUCAOXINGIGBTXUNMENGJUEQIDEJINTIAN,PINGMIANXINGIGBTYIRANYOUQIYIXIZHIDI。SUIRANZHANGJIANGHOULANGTUIQIANLANG,DANQIANLANGBINGWEIBEIPAISIZAISHATANSHANG,ZHEISHIYINWEIGOUCAOXINGIGBTYIRANYOUBUSHAOQUEDIANYOUDAIKEFU。

1)挖出表面光滑的槽壁技术难度大

YIBANGOUCAOZHAIGBTDEGOUCAOKUANDUJINYOU1~2um,ERSHENDUYAODADAO4、5umSHENZHIGENGSHEN。ZAIGUIBIAOMIANWACAOKAODESHISUANFUSHIDEFANGFA,JINGQUEKONGZHIGOUCAODEKUANDUHESHENDUSHIYIJIANHENYOUNANDUDESHIQING。TONGSHI,GOUCAOBIYAOJINKENENGDEGUANGHUAYUSHAOQUEXIAN,YINWEIBUGUANGHUADEBIAOMIANHUIYINGXIANGJICHUANDIANYA,JIANGDISHENGCHANCHENGPINLV。ERQIE,GOUCAODIBUDEDAOJIAOYEYAOZUODEFEICHANGYUANRUN,FOUZEDIANCHANGHUIZAIZHEILIJIZHONG,YANZHONGYINGXIANGNAIYA。YOUCIKEJIANGOUCAOIGBTBIPINGMIANIGBTGONGYINANDUYAOGAODEDUO。

2)较宽的导电沟道会增加IGBT短路时的电流

沟槽型IGBT沟道密度高,它在降低沟道电阻的同时,相应的缺点就是会提高短路电流。最不利的情况就是,短路电流可能会很大,以至于非常短时间内就损坏IGBT。为了使得IGBT具有10µs的短路能力(给定的测试条件下),需要非常小心的设计沟道宽度及相邻的元胞,比如增大元胞的间距,使单个晶元上有效元胞的数量减少。另外一种方法是不要把所有的栅极接到公共栅极,而是把一些单元的栅极和发射极直接短路。后者称为插入合并单元工艺。通过上述工艺,能够降低沟道密度,从而降低短路电流,增强器件短路能力。(英飞凌igbt厂家


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